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Transmission Electron Microscope (TEM) is a very powerful tool for characterizing various types of materials. Using a light microscope, the imaging resolution is at several hundred nanometers, and for a Scanning Electron Microscope (SEM) at several nanometers. The imaging resolution of the TEM, however, can routinely reach several angstroms on a modem instrument. In addition, the TEM can also provide material structural information, since the electrons penetrate through the thin specimens, and chemical compositional information due to the strong electron–specimen atom interactions.